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SAW sensor sensitivities are also dependant on their wavetype, configuration, components, materials, and applications. Some typical sensitivities are listed below:
| Physical quantity | Linear coefficient |
|---|---|
| Temperature | up to 100 ppm/K |
| Pressure, stress | 2 ppm/kPa |
| Force | 10 ppm/kN |
| Mass loading | 30 ppm/μg·cm2 |
| Voltage | 1 ppm/V |
| Electric field | 30 ppm/V·μm−1 |
Figure 6: Linear coefficients for physical effects on SAW sensors6.
SAW sensors are often valued for their high degree of sensitivity due to the concentration of energy at the device’s surface, where the external environment can have a greater effect. However, this is oftentimes a design challenge. For example, whereas surface acoustic waves with shear vertical components are very sensitive to changes in gaseous environments, they can undergo severe damping in liquid environments. Furthermore, in environments with large temperature fluctuations, a SAW sensor’s piezoelectric substrate can be affected by these fluctuations, often necessitating an additional “reference” configuration to control for such effects.
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