...
Strip silicon detectors consist of n type material while having p type aluminium strips on the surface which are separated by a thin insulator.
The crystalline structure is diamond cubic (FCC). Polysilicon consists of small Si crystals randomly oriented.
- Are metals used? Which ones? Why?
aluminium strips
...
- How is the sensor manufactured?
http://indico.cern.ch/event/124392/contribution/0/material/slides/0.pdf
1. Starting Point: single-crystal n-doped wafer.
2. Surface passivation by SiO2-layer. E.g. growing by (dry) thermal oxidation at 1030 °C.
3. Window opening using photolithography technique with etching, e.g. for strips!
4. Doping using either
• Thermal diffusion (furnace)
• Ion implantation
5. After ion implantation: Curing of damage via thermal annealing at approx. 600°C, (activation of dopant atoms by incorporation into silicon lattice)
6. Metallization of front side: sputtering or CVD
7. Removing of excess metal by photolitography: etching of non-covered areas
8. Full-area metallization of backplane with annealing at approx. 450°C for better adherence between metal and silicon
9. Wafer dicing (cutting)
- What are the typical manufacturing process steps?
Silicon micromachining
Photolithography
...