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  • How is the sensor manufactured?

http://indico.cern.ch/event/124392/contribution/0/material/slides/0.pdf

1.  Starting Point: single-crystal n-doped wafer. 
2.  Surface passivation by SiO2-layer. E.g. growing by (dry) thermal oxidation at 1030 °C.
3.  Window opening using photolithography technique with etching, e.g. for strips!
4. Doping using either 

...

  1.  Rehak, P. ; Brookhaven Nat. Lab., Upton, NY, USA. Silicon radiation detectors [online]. Nuclear Science Symposium Conference Record, 2003 IEEE  (Volume:5 ); 19-25 Oct. 2003, 2492-2497.

    URL: http://ieeexplore.ieee.org.ezproxy.metropolia.fi/stamp/stamp.jsp?tp=&arnumber=1352629, Accessed 16 March 2014.


  2. Virolainen, T. ; Kamarainen, V. ; Ji, F. ; Garcia, F. ; Orava, R. ; van Remortel, N. ; Santala, M. Silicon radiation detector development at VTT [online]. Nuclear Science Symposium Conference Record, 2007. NSS '07. IEEE  (Volume:2 ); Oct. 26 2007-Nov. 3 2007, 1494-1497.

    URL: http://ieeexplore.ieee.org.ezproxy.metropolia.fi/stamp/stamp.jsp?tp=&arnumber=4437282, Accessed 16 March 2014.


  3. Huhtinen, M. ; Res. Inst. for High Energy Phys., Helsinki, Finland ; Orava, R. ; Pimia, M. ; Tuuva, T. Single sided stereo angle silicon strip detector [online]. Nuclear Science, IEEE Transactions on  (Volume:40 ,  Issue: 4 ); Aug 1993, 227-229.

    URL: http://ieeexplore.ieee.org.ezproxy.metropolia.fi/stamp/stamp.jsp?tp=&arnumber=256575, Accessed 16 March 2014.


  4.  Yossi Eisen, Asher Shor, Israel Mardor (2004) CdTe and CdZnTe X-Ray and Gamma-Ray Detectors for Imaging Systems. IEEE transactions on  nuclear science; June 2004, Val. 51, No. 3.
  5.  Tom Schulman (2006) Si, CdTe and CdZnTe radiation detectors for imaging applications. University of Helsinki, Finland; June 19, 2006.


  6.  AJAT Ltd. official webpage 

    URL:  http://www.ajat.fi/, Accessed 17 March 2014.



  7.  Detection Technology Oy official webpage

    URL: http://www.deetee.com/en_US/home.html, Accessed  5 April 2014.



  8. Marubun Corporation official webpage

    URL: http://www.marubun.co.jp/product/measurement/sensor/8ids6e000000k1lh-att/X100-7SMD.pdf, Accessed  5 April 2014.


  9. Cremat Inc. official webpage 

    URL: http://www.cremat.com/ , Accessed  10 April 2014.


  10. Jacob Fraden–3rd ed. Handbook of modern sensors : physics, designs, and applications. Springer-Verlag New York, Inc., USA; 2004

  11.  Integrated Digital conference Official website.  International Workshop on Semiconductor Pixel Detectors for Particles and Imaging. Hotel Listel Inawashiro, Inawashiro, Japan; 2-9 Spt. 2012.
     URL: http://indico.cern.ch/event/137337/material/slides/0?contribId=10&sessionId=5

  12. Integrated Digital conference Official website. Silicon strips and pixels technologies event, CERN, Switzerland; 31.01.2011-10.02.2011.

URL: http://indico.cern.ch/event/124392/contribution/0/material/slides/0.pdf