Basic operation
Put simply, acoustic wave sensors send and receive acoustic waves "within" the device to promote an effect from the device's environment on these waves. The device operation itself is fairly simple:
- An electromagnetic impulse signal is sent to the device via wired connection or wireless antenna
- An input interdigital transducer (IDT) transduces the electromagnetic signal into an acoustic wave
- The acoustic wave propagates along the delay line and is affected by the environment along the way
- An output IDT transduces the acoustic impulse response wave back into an electromagnetic signal
- The electromagnetic response signal is transmitted for processing
The electromagnetic response is then analyzed to determine what changes the acoustic wave underwent during its propagation. These changes in frequency, phase, and amplitude can in turn be used to determine the properties of the environment through which the acoustic wave traveled.
Figure 1: Overview of acoustic wave sensor operation. Graphics edited from source7.
Acoustic wave sensors may also include a filtering element as a first step to sensing, for example, a particular chemical or biological compound. The acoustic wave sensor in this case is not directly sensing the compound, but instead sensing the response of the filtering element to the presence of the compound.
Basic device components
The basic components of an acoustic wave sensor are:
A piezoelectric substrate which generates electrical charges from mechanical force, and vice versa
- At least one interdigitalA transducer (IDT) to convert electromagnetic waves to acoustic waves, and vice versa
- An area of propagation, oftentimes conceived as a delay line, through which the acoustic wave propagates
Figure 2: Diagram of a surface acoustic wave sensor using a delay line. Source: http://en.wikipedia.org/wiki/File:Surface_Acoustic_Wave_Sensor_Interdigitated_Transducer_Diagram.png
Instead of multiple IDTs (as shown in the figures above), many acoustic wave sensors include only one IDT element for transducing both impulse and response signals. These devices use a reflector element to reflect the acoustic wave back into the same IDT that produced it. The slow propagation speed of the mechanical wave (compared to the electromagnetic impulse) along the delay line allows sufficient time for a short electromagnetic impulse input to dissipate before the reflected response is captured by the single IDT.
Piezoelectric substrate
A piezoelectric substance is a crystalline mineral which responds to a mechanical force by generating a voltage. This voltage is proportional to the amount of force applied as well as the type of force applied (i.e. tension and compression produce opposite polarities). Furthermore, this effect is reciprocal, so a piezoelectric substance will also respond to an electric field by generating a mechanical response that is proportional to the field's strength and polarity.
The material of the piezoelectric substrate determines the velocity of the acoustic wave, which is in the range of 1500-4800 m/s. This is 105 times slower than the electromagnetic wave velocity, allowing for a longer delay along a shorter delay line. The most common piezoelectric substrate materials are quartz, lithium niobate, lithium tantalate, zinc oxide, and bismuth germanium oxide.
Common sensor types:
Acoustic wave sensors are generally classified based on the propagation mode of the acoustic wave. Some common wave types and sensors are:
- Bulk acoustic wave (BAW): wave travels through the piezoelectric substrate
- Thickness shear mode resonator (TSM)
- Shear-horizontal acoustic plate mode sensor (SH-APM)
- Surface acoustic wave (SAW): wave travels on the surface of the substrate
- Rayleigh surface waves sensor (generally known as a SAW sensor)
- Shear-horizontal surface acoustic wave sensor (SH-SAW), also known as the surface transverse wave sensor (STW)
SAW devices are particular among this group since surface acoustic waves are more sensitive to velocity and amplitude changes due to the environment on the surface of the delay line. This results in higher sensitivity to environmental stimuli such as humidity, radiation, and viscosity.
Figure 3: Propagation of a Rayleigh surface acoustic wave with shear vertical component.
Source: http://www.tjhsst.edu/~jlafever/wanimate/Wave_Properties2.html
Figure 4: Propagation of a Love surface acoustic wave with shear horizontal component.
Source: http://www.tjhsst.edu/~jlafever/wanimate/Wave_Properties2.html
Generally, "SAW" sensors propagate Rayleigh surface acoustic waves. Rayleigh waves include a vertical shear component which further increases sensitivity to the device's external environment. However, this vertical shear component also undergoes severe damping when placed in a liquid medium, rendering Rayleigh SAW devices best suited for only gas and vacuum environments.
TSM, SH-APM, and SH-SAW devices are better suited for operation in liquid environments since their shear horizontal waves do not lose much energy into liquids.
Applications:
Acoustic wave sensors are very versatile in that they may be used alone or as part of a filtered sensor to measure many phenomena, including:
- mass
- temperature
- pressure
- stress, strain, and torque
- acceleration
- friction
- humidity and dewpoint
- UV radiation
- magnetic fields
- viscosity
Acoustic wave devices have been in commercial use for over 70 years, and their most common use is in the telecommunications industry as filters for signal processing applications. Recently, however, interest in acoustic wave devices for sensing applications has risen greatly due to their low cost, reliability, sensitivity, flexibility to measure many phenomena, and mature technology.
References and further reading:
1Vectron International, “Acoustic Wave Sensors”, (slide presentation and notes), http://www.sengenuity.com/tech_ref/AWS_WebVersion.pdf
2M. Hoummady et al (1997), “Acoustic wave sensors: design, sensing mechanisms and applications”, Smart Materials and Structures, Vol. 6, No. 6, December 1997, http://www.uta.edu/rfmems/BMC/0720/0902_backup/Background/sm7601.pdf
3J. Kirschner (2010), “Surface Acoustic Wave Sensors (SAWS): Design for Application”, Microelectromechanical Systems, December 6, 2010.
4M.F. Hribšek et al (2010), “Surface Acoustic Wave Sensors in Mechanical Engineering”, FME Transactions, Vol. 38, No. 1, 2010.
5A. Mamishev et al (2004), “Interdigital Sensors and Transducers”, Proceedings of the IEEE, Vol. 92, No. 5, May 2004, http://www.rle.mit.edu/cehv/documents/81-Proc.IEEE.pdf
6A. Pohl (2000), “A Review of Wireless SAW Sensors”, IEEE Transactions on Ultrasonics, Ferroelectronics, and Frequency Control, Vol. 47, No. 2, March 2000.
7V. Ferrari, R. Lucklum (2008), "Piezoelectric Transducers and Applications," 2nd edition, Springer Publishing.
8Drafts, Bill (2001) “Acoustic Wave Technology Sensors”, IEEE Transactions on Microwave Theory and Techniques, Vol. 49, No. 4, April 2001, http://www2.nkfust.edu.tw/~jcyu/Paper/Acoustic%20wave%20technology%20sensors.pdf
Footnotes
AThe interdigital transducers do not involve A/D conversion or digital data. Here, the term "digital" refers to the resemblance of IDTs to human fingers.